Sacrificial dielectric planarization layer
Sacrificial etchback layer for improved spin-on-glass planarizat
Scum solution for chemically amplified resist patterning in...
Sealed nitride layer for integrated circuits
Sealing sidewall pores in low-k dielectrics
Selective contact formation using masking and resist...
Selective etching process
Selective nitride liner formation for shallow trench isolation
Selective oxidation of gate stack
Selective partial curing of spin-on-glass by ultraviolet radiati
Selective removal of vertical portions of a film
Selective silicon etch process
Self aligned buried plate
Self-aligned collar and strap formation for semiconductor...
Self-aligned contact (SAC) etching using polymer-building chemis
Self-aligned dielectric cap
Self-aligned manufacturing method, and manufacturing method...
Self-aligned masks using multi-temperature phase-change...
Self-aligned process for making contacts to silicon substrates d
Self-aligned process for making contacts to silicon...