4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step
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BARC shaping for improved fabrication of dual damascene...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Barrier metal film production apparatus, barrier metal film...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Biased H 2 etch process in deposition-etch-deposition gap fill

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Bilayer anti-reflective coating and etch hard mask

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Blanket resist to protect active side of semiconductor

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Bright field image reversal for contact hole patterning

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Buried strap formation method for sub-150 nm best DRAM devices

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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