Partial via hard mask open on low-k dual damascene etch with...
Passivation layer for a metal film to prevent metal corrosion
Passivation of porous semiconductors for improved optoelectronic
Pattern forming method and manufacturing method of...
Patterned structures fabricated by printing mask over...
Patterning sub-lithographic features with variable widths
Photolithographic patterning process using a carbon hard...
Photoresist scum for copper dual damascene process
Pillar process for copper interconnect scheme
Pitch multiplication using self-assembling materials
Pitch reduction
Pitch reduction
Pitch reduction in semiconductor fabrication
Pitch reduction using a set of offset masks
Planarization of a patterned structure on a substrate using an i
Planarization of insulation film using low wettingness surface
Planarization process for semiconductor substrates
Planarization process using tailored etchback and CMP
Plasma and electron beam etching device and method
Plasma dielectric etch process including ex-situ backside...