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Ultra-thin Si MOSFET device structure and method of manufacture

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Uniform dopant distribution for mesas of semiconductors

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Unlanded via structure and method for making same

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Use of a plasma source to form a layer during the formation...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Use of dual patterning masks for printing holes of small...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Use of hydrocarbon addition for the elimination of...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Use of supercritical fluid for low effective dielectric...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Use of ultra-high magnetic fields in resputter and plasma...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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UV nanoimprint lithography process using elementwise...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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