4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step
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Vapor phase etching of oxide masked by resist or masking materia

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Patent

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Vertical type transistor and method for fabricating the same

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Via hole and trench structures and fabrication methods...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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