3-Dimensional flash memory device and method of fabricating...

Achievement of top rounding in shallow trench etch

Actuating transistor including reduced channel length

Adding SF.sub.6 gas to improve metal undercut for hardmask metal

Adhesion layer for etching of tracks in nuclear trackable...

Air gap formation

Apparatus and method for surface finishing a silicon film

Apparatus and method of fabricating thin film transistor...

Apparatus and methods for processing a workpiece

Apparatus and methods for processing a workpiece

Apparatus for processing a workpiece

Autoaligned etching process for realizing word lines in memory d

BARC shaping for improved fabrication of dual damascene...

Barrier metal film production apparatus, barrier metal film...

Biased H 2 etch process in deposition-etch-deposition gap fill

Bilayer anti-reflective coating and etch hard mask

Blanket resist to protect active side of semiconductor

Bright field image reversal for contact hole patterning

Buried strap formation method for sub-150 nm best DRAM devices

Capping layer for a semiconductor device and a method of...