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Sacrificial dielectric planarization layer

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Sacrificial etchback layer for improved spin-on-glass planarizat

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Sacrificial feature for corrosion prevention during CMP

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Sacrificial multilayer anti-reflective coating for mos gate...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Sample surface processing method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Scratch reduction for chemical mechanical polishing

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Scum solution for chemically amplified resist patterning in...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Sealed nitride layer for integrated circuits

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Sealing porous dielectrics with silane coupling reagents

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Sealing sidewall pores in low-k dielectrics

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Segmented box-in-box for improving back end overlay measurement

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Selective aluminum plug formation and etchback process

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Selective back side reactive ion etch

Semiconductor device manufacturing: process – Chemical etching
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Selective base etching

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Selective contact formation using masking and resist...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Selective dry etching method of undoped and doped silicon thin f

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Selective electrochemical process for creating semiconductor...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Selective etch for damage at exfoliated surface

Semiconductor device manufacturing: process – Chemical etching – Altering etchability of substrate region by compositional or...
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Selective etch method for selectively etching a multi-layer...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Selective etch process

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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