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Damage-free ashing process and system for post low-k etch

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Damascene gate semiconductor processing with local thinning...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Damascene method employing composite etch stop layer

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Damascene process at semiconductor substrate level

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Damascene process for fabricating interconnect layers in an...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Deadhesion method and mechanism for wafer processing

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Deadhesion method and mechanism for wafer processing

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Deadhesion method and mechanism for wafer processing

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Decapsulation techniques for multi-chip (MCP) devices

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Decreasing the residue of a silicon dioxide layer after...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Deep filled vias

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Deep sub-micron metal etch with in-situ hard mask etch

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Deep trench bottle-shaped etch in centura mark II NG

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Deep trench bottle-shaped etching using Cl2 gas

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Deep trench etch on bonded silicon wafer

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Deep trench formation in semiconductor device fabrication

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Deep trench self-alignment process for an active area of a...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Deep trench with enhanced sidewall surface area

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Deep UV anti-reflection coating etch

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Defect reduction of non-polar and semi-polar III-nitrides...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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