Ultra-high oxide to photoresist selective etch of...
Ultra-thin resist and barrier metal/oxide hard mask for...
Ultra-thin resist and nitride/oxide hard mask for metal etch
Ultra-thin Si MOSFET device structure and method of manufacture
Ultrasonic assisted etch using corrosive liquids
Ultrasonic processing of chemical mechanical polishing slurries
Ultrasonic processing of chemical mechanical polishing slurries
Ultrasonic-wave washing unit, ultrasonic-wave washing...
Undercut process with isotropic plasma etching at package level
Undoped and fluorinated amorphous carbon film as pattern...
Undoped silicon dioxide as etch mask for patterning of doped...
Undoped silicon dioxide as etch stop for selective etch of...
Uniform dopant distribution for mesas of semiconductors
Uniform gas flow arrangements
Unique chemical mechanical planarization approach which utilizes
Unique process chemistry for etching organic low-k materials
Unlanded via structure and method for making same
Use of a plasma source to form a layer during the formation...
Use of a plasma source to form a layer during the formation...
Use of a polish stop layer in the formation of metal structures