LandOfFree - US Patents - Listing for Semiconductor device manufacturing: process,Chemical etching

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Hard mask method for forming chlorine containing plasma etched l

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Hard mask method for transferring a multi-level photoresist patt

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step

Hard mask patterns of a semiconductor device and a method...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Hard mask process to control etch profiles in a gate stack

Semiconductor device manufacturing: process – Chemical etching – Altering etchability of substrate region by compositional or...

Hard mask removal

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step

Hard mask structure for deep trenched super-junction device

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step

Hard masking method for forming residue free oxygen...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means

Hardening of copper to improve copper CMP performance

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Hardmask for improved reliability of silicon based dielectrics

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step

Hardmask of amorphous carbon-hydrogen (a-C:H) layers with...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Hardmask trim method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

HBr silicon etching process

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

HCL in overetch with hard mask to improve metal line etching pro

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step

HDP-CVD dep/etch/dep process for improved deposition into...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step

HDP-CVD method for spacer formation

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step

HDP-CVD multistep gapfill process

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means

Headless CMP process for oxide planarization

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Heat treatment method for a silicon wafer and a silicon...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Helicon wave excitation to produce energetic electrons for manuf