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Radially oscillating carousel processing system for chemical mec

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Radiation-resistant zone plates and method of manufacturing...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Reactive ion etch method for forming vias through nitrogenated s

Semiconductor device manufacturing: process – Chemical etching
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Reactive ion milling/RIE assisted CMP

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Reactive plasma etch cleaning of high aspect ratio openings

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Reactor for processing a semiconductor wafer

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Reactor for processing a semiconductor wafer

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Reactor for processing a workpiece using sonic energy

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Reactor with heated and textured electrodes and surfaces

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Ready-to-use stable chemical-mechanical polishing slurries

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Real-time control of chemical-mechanical polishing...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Recessing trench to target depth using feed forward data

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Recovery of damages in a field oxide caused by high energy...

Semiconductor device manufacturing: process – Chemical etching – Altering etchability of substrate region by compositional or...
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Redistribution of copper deposited films

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Reduce line end pull back by exposing and etching space...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Reduced cross-contamination between chambers in a...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Reduced pad erosion

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Reduced silicon gouging and common source line resistance in...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Reduced size etching method for integrated circuits

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Reduced-particle method of processing a semiconductor and/or int

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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