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ALD gate electrode

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Ammonia passivation of metal gate electrodes to inhibit...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Amorphous silicon gate with mismatched grain-boundary microstruc

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Angled implant in a fabrication technique to improve...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Anneal sequence for high-&kgr; film property optimization

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Annealed poly-silicide etch process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Anti-oxidation layer formation by carbon incorporation

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Antireflective structure and method

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Apparatus and method for staircase raised source/drain...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Apparatus and methods for improving multi-gate device...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Atomic layer deposited ZrTiO 4 films

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Atomic layer deposition of GdScO3 films as gate dielectrics

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Bi-layer trim etch process to form integrated circuit gate...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Bit line contact structure and method for forming the same

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Body capacitor for SOI memory description

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Boron diffusion barrier by nitrogen incorporation in spacer...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Boron incorporated diffusion barrier material

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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BPSG, SA-CVD liner/P-HDP gap fill

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Capping layer for reducing amorphous carbon contamination of...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Carrier mobility enhanced channel devices and method of...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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