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Damage free gate dielectric process during gate electrode plasma

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Damascene process for MOSFET fabrication

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Damascene T-gate using a spacer flow

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Dark field image reversal for gate or line patterning

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Dense flash EEPROM cell array and peripheral supporting circuits

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Patent

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Device performance improvement by heavily doped pre-gate and...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Device structure and method for reducing silicide encroachment

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Differential poly-edge oxidation for stable SRAM cells

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Dishing-free gap-filling with multiple CMPs

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Dopant diffusion-retarding barrier region formed within...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Dopant implantation processing for improved source/drain...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Double gate oxide layer method of manufacture

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Double spacer technology for making self-aligned contacts (SAC)

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Dry etch process for small-geometry metal gates over thin...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Dry etching method for semiconductor device

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Dual damascene metal interconnect structure with dielectric...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Dual damascene method for backened metallization using poly...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Dual level contacts and method for forming

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Dual material gate MOSFET technique

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Dual metal gate self-aligned integration

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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