Damage free gate dielectric process during gate electrode plasma
Damascene process for MOSFET fabrication
Damascene T-gate using a spacer flow
Dark field image reversal for gate or line patterning
Dense flash EEPROM cell array and peripheral supporting circuits
Device performance improvement by heavily doped pre-gate and...
Device structure and method for reducing silicide encroachment
Differential poly-edge oxidation for stable SRAM cells
Dishing-free gap-filling with multiple CMPs
Dopant diffusion-retarding barrier region formed within...
Dopant implantation processing for improved source/drain...
Double gate oxide layer method of manufacture
Double spacer technology for making self-aligned contacts (SAC)
Dry etch process for small-geometry metal gates over thin...
Dry etching method for semiconductor device
Dual damascene metal interconnect structure with dielectric...
Dual damascene method for backened metallization using poly...
Dual level contacts and method for forming
Dual material gate MOSFET technique
Dual metal gate self-aligned integration