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Passivating inorganic bottom anti-reflective coating (BARC)...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Patterning with rigid organic under-layer

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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PE-SiN spacer profile for C2 SAC isolation window

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Phosphoric acid free process for polysilicon gate definition

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Phosphoric acid free process for polysilicon gate definition

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Photoresist etch back method for gate last process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Planarization of a gate electrode for improved gate...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reissue Patent

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Planarizing a semiconductor structure to form replacement...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Plasma enhanced method for increasing silicon-containing...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Plasma oxidation method and method for manufacturing...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Plasma treatment at film layer to reduce sheet resistance...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Plasma-enhanced chemical vapor deposition of a nucleation...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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PMOS device having a layered silicon gate for improved...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Poly gate CD passivation for metrology control

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Poly-silicon-germanium gate stack and method for forming the...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Poly-silicon-germanium gate stack and method for forming the...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Poly/silicide stack and method of forming the same

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Polycide gate structure and method of manufacture

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Polycide structure and method for forming polycide structure

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Polysilicon gate electrode critical dimension and drive current

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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