4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. Insulated gate formation
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One step salicide process without bridging

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Optimized gate implants for reducing dopant effects during...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Oxygen-doped in-situ doped amorphous silicon multilayer gate str

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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