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Bi-layer trim etch process to form integrated circuit gate...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Bit line contact structure and method for forming the same

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Body capacitor for SOI memory description

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Boron diffusion barrier by nitrogen incorporation in spacer...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Boron incorporated diffusion barrier material

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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BPSG, SA-CVD liner/P-HDP gap fill

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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