Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate
2008-03-14
2010-11-16
Monbleau, Davienne (Department: 2893)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
Insulated gate formation
C257SE21040, C257SE21085, C257SE21127, C257SE27111
Reexamination Certificate
active
07833889
ABSTRACT:
Embodiments of an apparatus and methods for improving multi-gate device performance including methods to fabricate a plurality of multi-gate fins from a diffused body of a substantially planar structure that is substantially electrically isolated using a shallow trench region are generally described herein. Other embodiments may be described and claimed.
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Doyle Brian
Kavalieros Jack
Pillarisetty Ravi
Rakshit Titash
Intel Corporation
Lane Scott M.
Monbleau Davienne
Mulcare Shweta
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