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Large-scale trimming for ultra-narrow gates

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Laser activation of implanted contact plug for memory...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Laser annealing method for manufacturing semiconductor device

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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LDD transistor using novel gate trim technique

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Lightly nitridation surface for preparing thin-gate oxides

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Lithographic template and method of formation and use

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Lithography and etching process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Local interconnect manufacturing process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Local interconnect structures for integrated circuits and...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Low nisi/si interface contact resistance with preamorphizing...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Low resistance gate electrode layer and method of making same

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Low resistance gate flash memory

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Low resistance self aligned extended gate structure...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Low resistance T-gate MOSFET device using a damascene gate...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Low temperature nitridation of amorphous high-K metal-oxide...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Low temperature process to locally form high-k gate dielectrics

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Low temperature sidewall oxidation of W/WN/poly-gatestack

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Low temperature sub-atmospheric ozone oxidation process for maki

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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LPCVD gate hard mask

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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