ALD gate electrode
Ammonia passivation of metal gate electrodes to inhibit...
Amorphous silicon gate with mismatched grain-boundary microstruc
Angled implant in a fabrication technique to improve...
Anneal sequence for high-&kgr; film property optimization
Annealed poly-silicide etch process
Anti-oxidation layer formation by carbon incorporation
Antireflective structure and method
Apparatus and method for staircase raised source/drain...
Apparatus and methods for improving multi-gate device...
Atomic layer deposited ZrTiO 4 films
Atomic layer deposition of GdScO3 films as gate dielectrics