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ALD gate electrode

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Ammonia passivation of metal gate electrodes to inhibit...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Amorphous silicon gate with mismatched grain-boundary microstruc

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Patent

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Angled implant in a fabrication technique to improve...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Anneal sequence for high-&kgr; film property optimization

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Annealed poly-silicide etch process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Anti-oxidation layer formation by carbon incorporation

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Antireflective structure and method

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Apparatus and method for staircase raised source/drain...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Apparatus and methods for improving multi-gate device...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Atomic layer deposited ZrTiO 4 films

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Atomic layer deposition of GdScO3 films as gate dielectrics

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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