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Vapor phase deposition apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Vapor phase deposition apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Vapor phase deposition system

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Vapor phase epitaxial growth apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Vapor phase epitaxial growth apparatus having exhaust unit for r

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Vapor phase growth apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Vapor phase growth system and a gas-drive motor

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Vapor source for vacuum coating installation

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Vapor-phase deposition apparatus and vapor-phase deposition meth

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Vapor-phase deposition apparatus and vapor-phase deposition meth

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Vapor-phase film growth apparatus and gas ejection head

Coating apparatus – Gas or vapor deposition
Patent

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Vapor-phase growth apparatus and compound semiconductor device f

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Vapor-phase reaction apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Vaporization and deposition apparatus

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Vaporization arrangement with a rectangular vaporization crucibl

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent

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Vaporization source with baffle

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Vaporized-metal cluster ion source and ionized-cluster beam depo

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Vaporizer

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Vaporizer and processor

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Vaporizer and semiconductor processing apparatus

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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