UHV horizontal hot wall cluster CVD/growth design

Ultra fine particle gas deposition apparatus

Ultra high speed uniform plasma processing system

Ultra high throughput wafer vacuum processing system

Ultra-high frequency device for depositing thin films on solids

Underplatform coating tool

Unibody crucible and effusion cell employing such a crucible

Unibody crucible and effusion source employing such a crucible

Uniform gas cushion wafer support

Uniform gas distributor to a wafer

Uniform gas flow CVD apparatus

Uniform magnetically enhanced reactive ion etching using...

Uniformity control for low flow process and chamber to...

Unit for vaporizing liquid materials

Unitary removable shield assembly

Unitary wafer plasma enhanced chemical vapor deposition holding

Unwinding of plastic film in the presence of a plasma

Upstream cathode assembly

Use of a particulate packed bed at the inlet of a vertical tube

Use of an asymmetric waveform to control ion bombardment during