Vaporizer and semiconductor processing apparatus

Details Vaporizer and semiconductor processing apparatus Vaporizer and semiconductor processing apparatus

2004-05-11

2010-02-23

Cleveland, Michael (Department: 1792)

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

Reexamination Certificate

active

07666260

ABSTRACT:
A vaporizer includes a vaporizing chamber configured to vaporize a liquid material and thereby form a gas material. A spray portion is configured to spray the liquid material in the vaporizing chamber. A delivery part is configured to deliver the gas material from the vaporizing chamber to a gas outlet. A heating portion is configured to heat the vaporizer. The delivery part includes a filter member covering the gas outlet and configured to allow the gas material to pass therethrough. A shield plate is disposed to cover the filter member on a side farther from the gas outlet.

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