ECR plasma apparatus

ECR plasma generation apparatus and methods

ECR plasma generator and an ECR system using the generator

ECR plasma source for gas abatement

ECR plasma source for remote processing

Edge sealing structure for substrate in low-pressure...

Effusion cell

Effusion cell and method of use in molecular beam epitaxy

Effusion cell assembly for epitaxial apparatus

Effusion cell crucible with thermocouple

Effusion cell for Si and molecular beam epitaxy system

Effusion cell of a molecular beam epitaxy system

Electric arc vapor deposition apparatus and method

Electrical contact apparatus for use with plasma or glow dischar

Electrical coupling between chamber parts in electronic...

Electrically conductive containment vessel for molten aluminum

Electrically insulating sealing structure and its method of use

Electrode arrangement

Electrode assembly for plasma processing apparatus

Electrode for plasma processes and method for manufacture and us