4. Coating apparatus
  5. Gas or vapor deposition
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Decompression container

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Decompression container

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Deflected flow in chemical vapor deposition cell

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Degassing method and apparatus

Coating apparatus – Gas or vapor deposition
Patent

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Delivering particulate material to a vaporization zone

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Deposit film forming apparatus with microwave CVD method

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Deposited film forming apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Deposited film forming apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Deposited film forming apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Deposited film forming apparatus and deposited film forming...

Coating apparatus – Gas or vapor deposition – Running length work
Reexamination Certificate

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Deposited film forming apparatus and electrode for use in it

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Deposited film forming system and process

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Deposited-film forming apparatus

Coating apparatus – Gas or vapor deposition – Means to coat or impregnate particulate matter
Reexamination Certificate

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Deposited-film-forming apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Depositing polysilicon films having improved uniformity and...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Deposition apparatus

Coating apparatus – Gas or vapor deposition – Having means to expose a portion of a substrate to coating...
Reexamination Certificate

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Deposition apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Deposition apparatus

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Deposition apparatus

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Deposition apparatus and related method with controllable...

Coating apparatus – Gas or vapor deposition – Having means to expose a portion of a substrate to coating...
Reexamination Certificate

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