Coating apparatus – Gas or vapor deposition – Work support
Patent
1994-11-10
1996-09-24
Breneman, R. Bruce
Coating apparatus
Gas or vapor deposition
Work support
118500, 4151221, 415202, C23C 1600, F01D 512, F01D 700
Patent
active
055587216
ABSTRACT:
A vapor phase growth system comprises a gas-drive motor including a ring-shaped stator and a rotor housed in a rotor chamber formed in the stator, and designed to rotate the rotor by injecting a gas toward gas receiving grooves in the peripheral surface of the rotor through injection ports which open in the peripheral surface of the rotor chamber. A rotating shaft of a susceptor rotating mechanism extends along the axis of a susceptor in a reactor, and has one end fixed to the top wall of the susceptor. A tray rotating shaft, having one end fixed to each of trays arranged individually in recesses in the outer surface of the susceptor, extends penetrating the peripheral wall of the susceptor. As a rotating shaft of a drive mechanism rotates, a wafer supported by each tray revolves around the rotating shaft. A gear fixed to the other end of the tray rotating shaft is in mesh with a ring gear on the upper end face of a hollow rotating member fixed to the upper surface of the rotor and located coaxially with the rotating shaft of the drive mechanism. As the rotor rotates, each tray is rotated by the tray rotating shaft gear-connected to the hollow rotating member, so that the wafer rotates around the tray rotating shaft. Accordingly, the speeds of rotation and revolution of the wafer can change independently of each other.
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IBM Technical Disclosure Bulletin, Air Driven Motor, R. Adsmond R. G. Hastede, vol. 13, No. 7 Dec. 1970 p. 6 1982.
Kohmura Yukio
Toyosaki Koichi
Breneman R. Bruce
Lund Jeffrie R.
The Furukawa Electric Co. Ltd.
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