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  5. Gas or vapor deposition
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Quartz wafer processing chamber

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Quartz-glass reactor for MOCVD systems

Coating apparatus – Gas or vapor deposition
Patent

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Quasi-remote plasma processing method and apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Quick release process kit

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Quick-change flange

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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