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Backflush chamber clean

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Backside gas delivery system for a semiconductor wafer...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Baffled liner cover

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Band coating apparatus

Coating apparatus – Gas or vapor deposition – Running length work
Patent

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Barrel structure for semiconductor epitaxial reactor

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Barrel type of epitaxial vapor phase growing apparatus

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Barrel type susceptor

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Barrier coating for vitreous materials

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Batch processing platform for ALD and CVD

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Batch-type remote plasma processing apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Batch-type remote plasma processing apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Bell jar having integral gas distribution channeling

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Bell of opaque fused silica

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Bias ECR plasma CVD apparatus comprising susceptor, clamp, and c

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Biased ion beam deposition of high density carbon

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Blocker plate by-pass for remote plasma clean

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Blocker plate bypass to distribute gases in a chemical vapor...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Bolt and plasma processing apparatus provided with same

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Bonded silicon carbide parts in a plasma reactor

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Bottom purge manifold for CVD tungsten process

Coating apparatus – Gas or vapor deposition – Work support
Patent

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