Vaporizer

Details Vaporizer Vaporizer

2005-09-27

2008-11-18

Cronin, Stephen K. (Department: 3747)

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

C392S401000, C392S399000

Reexamination Certificate

active

07452424

ABSTRACT:
A vaporizer for generating a process gas from a gas-liquid mixture fluid includes a container defining a process space of the vaporizer. A supply head having a plurality of spray holes to spray the fluid is disposed within the container. A heating passage is disposed below the spray holes within the container. The heating passage is configured to heat the fluid passing therethrough and thereby generate the process gas. A gas delivery passage is connected to the container to laterally deliver the process gas from below the heating passage. A mist receiver is provided at the container below the gas delivery passage.

REFERENCES:
patent: 3651789 (1972-03-01), Giardina
patent: 3848572 (1974-11-01), Giardina
patent: 3892205 (1975-07-01), Naitou et al.
patent: 4252087 (1981-02-01), Kime
patent: 4924936 (1990-05-01), McKown
patent: 5451260 (1995-09-01), Versteeg et al.
patent: 6461982 (2002-10-01), DeBoer et al.
patent: 6503837 (2003-01-01), Chiou
patent: 2002/0195643 (2002-12-01), Harada
patent: 8-17749 (1996-01-01), None

Affiliated with

Also associated with

Rating

Vaporizer does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Vaporizer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Vaporizer will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4027521