4. Coating apparatus
  5. Gas or vapor deposition
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Head for vaporizing and flowing various precursor materials...

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Heat exchange passage connection

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Heat pipe susceptor for epitaxy

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Heat processing apparatus for semiconductor manufacturing

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Heat processing apparatus for semiconductor process

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Heat sink method of manufacturing the same and device of manufac

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Heat transfer assembly

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Heat transfer system for improved semiconductor processing...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Heat treating apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Heat treating apparatus having heat transmission-preventing plat

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Heat treating device

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Heat treatment apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Heat treatment apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Heat treatment apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Heat treatment apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Heat treatment apparatus and cleaning method of the same

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Heat treatment apparatus and method of forming a thin film using

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Heat treatment boat

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Heat treatment boat

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Heat treatment boat support

Coating apparatus – Gas or vapor deposition – Work support
Patent

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