Vaporization arrangement with a rectangular vaporization crucibl

Details Vaporization arrangement with a rectangular vaporization crucibl Vaporization arrangement with a rectangular vaporization crucibl

1986-12-15

1988-02-16

Bueker, Richard R.

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

219121EE, C23C 1424

Patent

active

047247967

ABSTRACT:
A vaporization arrangement for coating substrates disposed in an areal region, or past through an areal region, comprises a rectangular vaporization crucible with a crucible rim, as well as plurality of electron guns each having an X-Y deflecting system. The electron guns are disposed on one side of the drucible axis separately from the crucible in such a manner that their beam axis extend parallel to one another and are directed on a plane passing vertically through the longitudinal axis of the crucible. The arrangement further comprises means for deflecting the electron means onto the surface of the contents of the crucible. Such means include an alternating serial arrangement of linear coils, on the side of the crucible opposite to the electron guns, and pole plates disposed both between the linear coils and at their ends. The pole plates at the ends of a linear coil in each case assume such a position relative to an opposite electron gun, such that the beam axis is substantially in a perpendicular plane of symmetry between the pole plates.

REFERENCES:
patent: 3329524 (1967-07-01), Smith
patent: 3390249 (1968-06-01), Hanks
patent: 3575132 (1971-04-01), Fransisco
patent: 4131753 (1978-12-01), Tsujimoto
patent: 4238525 (1980-12-01), Aichert
patent: 4532888 (1985-08-01), Neumann
patent: 4620081 (1986-10-01), Zeren

Affiliated with

Also associated with

Rating

Vaporization arrangement with a rectangular vaporization crucibl does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Vaporization arrangement with a rectangular vaporization crucibl, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Vaporization arrangement with a rectangular vaporization crucibl will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2215358