Large area microwave plasma apparatus
Large area microwave plasma apparatus with adaptable applicator
Large area plasma source
Large area plasma source
Large area plasma source
Laser CVD device
Laser CVD device and laser CVD method
Laser deposition apparatus for depositing a large area oxide thi
Laser desorption of CVD precursor species
Laser sputtering apparatus
Laser-assisted chemical vapor deposition
Layer forming apparatus
Layer forming method, product comprising the layer, optical...
Layer forming method, product comprising the layer, optical...
Layer forming method, product comprising the layer, optical...
Layer member forming method
Layer-by-layer etching apparatus using neutral beam and...
Lens plasma coating system
Lid assembly for a processing system to facilitate...
Lid assembly for a processing system to facilitate...