Radial antenna and plasma device using it

Radial flow reactor including glow discharge limitting shield

Radiation heated reactor for chemical vapor deposition on substr

Radio frequency plasma enhanced chemical vapor deposition proces

Radio frequency supply circuit for in situ cleaning of...

Rapid response vapor source

Rapid thermal CVD apparatus

Rapid thermal heating apparatus including a substrate support an

Rapid thermal processing apparatus for processing semiconductor

Rapid thermal processing barrel reactor for processing substrate

Rapid thermal processing susceptor

Rapid-switching rotating disk reactor

Raw material feeding device, film formation system and...

Reactant gas ejector head and thin-film vapor deposition apparat

Reactant gas flow structure for a low pressure chemical vapor de

Reactant gas injection for IC processing

Reaction apparatus

Reaction apparatus for atomic layer deposition

Reaction chamber component having improved temperature uniformit

Reaction chamber design to minimize particle generation in chemi