Vapor source for vacuum coating installation

Details Vapor source for vacuum coating installation Vapor source for vacuum coating installation

1986-01-31

1988-06-07

Bueker, Richard R.

Coating apparatus

Gas or vapor deposition

With treating means

118727, 118 50, C23C 1400

Patent

active

047489359

ABSTRACT:
A vapor source for a vacuum-coating installation comprises a rotatably mounted vaporizing crucible, a drive motor and a device, preferably an electron beam gun, for heating the material to be vaporized, all arranged in one structural unit, movable as a whole in the coating installation. With this, the site of the vaporization for a given layer-thickness distribution can be selected optimally to correspond to the respective applications.

REFERENCES:
patent: 2435997 (1948-02-01), Bennett
patent: 4115653 (1978-09-01), Kienel et al.
patent: 4221629 (1980-09-01), Zollinger
patent: 4620081 (1986-10-01), Zeren

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