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Adsorption based material removal process

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Adsorption based material removal process

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Advanced etching method for VLSI fabrication

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Advanced high-k gate stack patterning and structure...

Semiconductor device manufacturing: process – Chemical etching – Having liquid and vapor etching steps
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Advanced process control for low variation treatment in...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Air bridge process for forming air gaps

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Air gap formation

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Air gap under on-chip passive device

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Alignment strategy for asymmetrical alignment marks

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Alkali etching liquid for silicon wafer and etching method...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Alkaline etchant for controlling surface roughness of...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Alternative method for advanced CMOS logic gate etch...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Alternative plasma chemistry for enhanced photoresist removal

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Alternative related to SAS in flash EEPROM

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Alumina abrasive for chemical mechanical polishing

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Alumina abrasive for chemical mechanical polishing

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Ammonium hydroxide treatments for semiconductor substrates

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Anisotropic and selective nitride etch process for high aspect r

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Anisotropic dry etching technique for deep bulk silicon etching

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Anisotropic etch method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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