LandOfFree - US Patents - Listing for Semiconductor device manufacturing: process,Chemical etching,Vapor phase etching

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method and structure for ultra narrow gate

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method and system for copper interconnect formation

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method and system for forming a feature in a high-k layer

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method and system for forming a feature in a high-k layer

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method and system for forming a semiconductor device

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method and system for patterning to enhance performance of a met

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method and system for processing substrate

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method and system for uniformity control in ballistic...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method and system to control the concentration of dissolved...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method for a gate last process

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method for a tungsten silicide etch

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method for adjusting a critical dimension in a high aspect...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method for anchoring via/contact in semiconductor devices and de

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method for anisotropic plasma etching using...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method for anisotropic plasma-chemical dry etching of...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method for anisotropically etching tungsten using SF.sub.6, CHF.

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method for assaying elements in a substrate for optics,...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method for atomic layer deposition of materials using a...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method for avoiding carbon and nitrogen contamination of a...