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Backside etch process chamber and method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Backside unlayering of MOSFET devices for electrical and...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Backside unlayering of MOSFET devices for electrical and...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Barrier metal film production method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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BC13/AR chemistry for metal overetching on a high density...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Beat frequency modulation for plasma generation

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Bi-directional processing chamber and method for...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Bi-layer resist process

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Bi-level resist structure and fabrication method for contact...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Bi-level resist structure and fabrication method for contact...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Bomine and iodine etch process for silicon and silicides

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Bonded sapphire polygon shield

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Borderless interconnection process

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Borderless vias without degradation of HSQ gap fill layers

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Borderless vias without degradation of HSQ gap fill layers

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Bottom electrode for MRAM device and method to fabricate it

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Bottom rounding in shallow trench etching using a highly isotrop

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Brim and gas escape for non-contact wafer holder

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Bromine and iodine etch process for silicon and silicides

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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