Hard mask layer stack and a method of patterning
Hard mask method for forming chlorine containing plasma etched l
Hard mask method for transferring a multi-level photoresist patt
Hard mask process to control etch profiles in a gate stack
Hardmask for improved reliability of silicon based dielectrics
Hardmask trim method
HBr silicon etching process
HCL in overetch with hard mask to improve metal line etching pro
Heat treatment method for a silicon wafer and a silicon...
Helicon wave excitation to produce energetic electrons for manuf
Helium-based etch process in deposition-etch-deposition gap...
Helium-based etch process in deposition-etch-deposition gap...
Heterojunction compound semiconductor device and method of manuf
High aspect ratio sub-micron contact etch process in an...
High aspect ratio via etch
High density plasma (HDP) etch method for suppressing micro-load
High density plasma etching of metallization layer using chlorin
High density plasma gapfill deposition-etch-deposition...
High flow vacuum chamber including equipment modules such as a p
High ion energy and reative species partial pressure plasma...