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Hard mask layer stack and a method of patterning

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Hard mask method for forming chlorine containing plasma etched l

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Hard mask method for transferring a multi-level photoresist patt

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Hard mask process to control etch profiles in a gate stack

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Hardmask for improved reliability of silicon based dielectrics

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Hardmask trim method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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HBr silicon etching process

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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HCL in overetch with hard mask to improve metal line etching pro

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Heat treatment method for a silicon wafer and a silicon...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Helicon wave excitation to produce energetic electrons for manuf

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Helium-based etch process in deposition-etch-deposition gap...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Helium-based etch process in deposition-etch-deposition gap...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Heterojunction compound semiconductor device and method of manuf

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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High aspect ratio sub-micron contact etch process in an...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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High aspect ratio via etch

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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High density plasma (HDP) etch method for suppressing micro-load

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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High density plasma etching of metallization layer using chlorin

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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High density plasma gapfill deposition-etch-deposition...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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High flow vacuum chamber including equipment modules such as a p

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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High ion energy and reative species partial pressure plasma...

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