Micromechanical system fabrication method using (111) single cry

Micromechanical system fabrication method using (111) single...

Microstructure producing method capable of controlling...

Modified facet etch to prevent blown gate oxide and increase...

Modified facet etch to prevent blown gate oxide and increase...

Monolithic low dielectric constant platform for passive...

Multi-layer hard mask for deep trench silicon etch

Multi-layer interconnect with isolation layer

Multi-layer interconnect with isolation layer

Multi-purpose composite mask for dual damascene patterning

Multi-step selective etching for cross-point memory

Multiple etch method for optimizing Inter-Metal Dielectric (IMD)

Multiple etch methods for forming contact holes in microelectron

N2/H2 chemistry for dry development in top surface imaging...

Nanoparticles and method for making the same

Nanoparticles and method for making the same

Narrow channel width effect modification in a shallow trench...

Negative tone double patterning method

Non self-aligned shallow trench isolation process with...

Optical device having micro lens array and method for...