Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate
2006-10-31
2006-10-31
Lee, Eddie (Department: 2811)
Semiconductor device manufacturing: process
Chemical etching
Combined with coating step
C216S002000, C216S079000, C257SE21023
Reexamination Certificate
active
07129176
ABSTRACT:
An optical device includes a semiconductor substrate and an optical part having a plurality of columnar members disposed on the substrate. Each columnar member is disposed in a standing manner and adhered each other so that the optical part is provided. The optical part is integrated with the substrate. This optical part has high design freedom.
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Kano Kazuhiko
Morishita Toshiyuki
Noda Yoshitaka
Oohara Junji
Takeuchi Yukihiro
Arena Andrew O.
Denso Corporation
Lee Eddie
Posz Law Group , PLC
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