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Use of supercritical fluid for low effective dielectric...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Use of ultra-high magnetic fields in resputter and plasma...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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UV nanoimprint lithography process using elementwise...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Vapor phase etching of oxide masked by resist or masking materia

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Vertical type transistor and method for fabricating the same

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Via hole and trench structures and fabrication methods...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Wafer etching techniques

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Wafer-level transfer of membranes with gas-phase etching and...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Winged vias to increase overlay margin

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Write head fabrication by inverting order of process steps

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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