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Method and device for detecting the end point of plasma process

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Method and device for plasma-etching organic material film

Etching a substrate: processes – Gas phase etching of substrate
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Method and device for plasma-etching organic material film

Etching a substrate: processes – Gas phase etching of substrate
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Method and device for removing layers in some areas of glass...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method and devices for detecting the end point of plasma process

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Method and structure for controlling plasma uniformity

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method and system for controlling the uniformity of a...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Method and system for dry etching a metal nitride

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method and system for identifying process conditions

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Method and system for integrated circuit backside navigation

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Method and system for processing multi-layer films

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Method and system for wafer inspection

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Method and system of discriminating substrate type

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Method for adjusting voltage on a powered Faraday shield

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Method for applying decorative contrast designs to automotive an

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method for automatic determination of substrates states in...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Method for automatic determination of substrates states in...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Method for conditioning a plasma etch chamber

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method for conditioning a process chamber

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method for controlled removal of material from a solid surface

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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