LandOfFree - US Patents - Listing for Etching a substrate: processes,Gas phase etching of substrate

Etching a substrate: processes – Gas phase etching of substrate

Manufacturing method for vibrator

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Manufacturing method of semiconductor device

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting

Materials processing by separately generated process medium cons

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting

Measurement to determine plasma leakage

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate

Mechanism for bow reduction and critical dimension control...

Etching a substrate: processes – Gas phase etching of substrate – Etching a multiple layered substrate where the etching...

Mechanism for uniform etching by minimizing effects of etch rate

Etching a substrate: processes – Gas phase etching of substrate

Medical devices having textured surfaces

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting

Metal bridging monitor for etch and CMP endpoint detection

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting

Metallic precipitate monitoring method

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting

Method & apparatus for monitoring plasma processing...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Method and an electrode system for excitation of a plasma

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Method and apparatus for achieving etch rate uniformity in a rea

Etching a substrate: processes – Gas phase etching of substrate

Method and apparatus for chalcogenide device formation

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...

Method and apparatus for controlling material removal from...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting

Method and apparatus for determining an etch endpoint

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting

Method and apparatus for determining an etch property using...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate

METHOD AND APPARATUS FOR DRY-ETCHING HALF-TONE PHASE-SHIFT...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Method and apparatus for electrostatically maintaining...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Method and apparatus for electrostatically maintaining...