LandOfFree - US Patents - Listing for Etching a substrate: processes,Gas phase etching of substrate

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Deformation reduction at the main chamber

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting

Detection method of coating film thickness and ion...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Detection of hardmask removal using a selective etch

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting

Determining endpoint in etching processes using principal...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Device and method for anisotropic plasma etching of a...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Device and method for etching a substrate using an...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Device and method for processing a plasma to alter the surface o

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Device transfer method

Etching a substrate: processes – Gas phase etching of substrate – Etching a multiple layered substrate where the etching...

Diamond-like carbon for use in VLSI and ULSI interconnect system

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Dielectric etch process reducing striations and maintaining...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate

Differential etch rate control of layers deposited by...

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...

Diffusion patterning process and screen therefor

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting

Disturbance-free, recipe-controlled plasma processing method

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Domed extension for process chamber electrode

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate

Dry etch process for titanium-tungsten films

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Dry etching gas

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Dry etching gas and method for dry etching

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Dry etching method

Etching a substrate: processes – Gas phase etching of substrate

Dry etching method