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Fabrication method with energy beam

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Fabrication of improved low-k dielectric structures

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...
Reexamination Certificate

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Fabrication of long range periodic nanostructures in...

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...
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FIB milling of copper over organic dielectrics

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Film formation apparatus and method of using the same

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Film removal employing a remote plasma source

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Film removal method and apparatus

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Fin structure formation

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Fine pattern forming method and fine pattern device

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Patent

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Fixture for in-situ noncontact monitoring of wet chemical etchin

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Fixtures for processing a workpiece in a supercritical fluid

Etching a substrate: processes – Gas phase etching of substrate
Reexamination Certificate

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Fluoride gas etching of silicon with improved selectivity

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Fluorine free integrated process for etching aluminum...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Focused ion beam process for removal of copper

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...
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Forming surface features using self-assembling masks

Etching a substrate: processes – Gas phase etching of substrate
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