Method and system of discriminating substrate type

Details Method and system of discriminating substrate type Method and system of discriminating substrate type

2007-05-01

2007-05-01

Alanko, Anita (Department: 1765)

Etching a substrate: processes

Gas phase etching of substrate

With measuring, testing, or inspecting

C438S009000, C438S016000

Reexamination Certificate

active

10809474

ABSTRACT:
A method and system for determining a substrate type during a seasoning process is presented. An optical signal is acquired from a process in a plasma processing system, and the optical signal is compared to a pre-determined threshold value. Depending upon the comparison, the substrate type is determined to be of a correct type, or an incorrect type.

REFERENCES:
patent: 5788869 (1998-08-01), Dalton et al.
patent: 5877032 (1999-03-01), Guinn et al.
patent: 6046796 (2000-04-01), Markle et al.
patent: 6060328 (2000-05-01), En et al.
patent: 6950178 (2005-09-01), Rueger et al.
patent: 2003/0052083 (2003-03-01), Kim et al.

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