4. Etching a substrate: processes
  5. Gas phase etching of substrate
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Nano fabrication method for glass

Etching a substrate: processes – Gas phase etching of substrate
Reexamination Certificate

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Nano-tip fabrication by spatially controlled etching

Etching a substrate: processes – Gas phase etching of substrate
Reexamination Certificate

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Nanoimprint resist

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Near substrate reactant homogenization apparatus

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Near Substrate reactant Homogenization apparatus

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Negative ion deductive source for etching high aspect ratio stru

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Notch-free etching of high aspect SOI structures using...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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