4. Etching a substrate: processes
  5. Gas phase etching of substrate
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Vacuum plasma processor having a chamber with electrodes and...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Vacuum processing apparatus and substrate transfer method

Etching a substrate: processes – Gas phase etching of substrate
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Vacuum processing apparatus and vacuum processing method of...

Etching a substrate: processes – Gas phase etching of substrate
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Vacuum treatment apparatus

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Vapor selective etching method and apparatus

Etching a substrate: processes – Gas phase etching of substrate – Etching vapor produced by evaporation – boiling – or sublimation
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Vapor-phase processing method and apparatus therefor

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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VD process and apparatus for producing stand-alone thin films

Etching a substrate: processes – Gas phase etching of substrate – Etching a multiple layered substrate where the etching...
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