Radical generating method, etching method and apparatus for...

Reactive Ion Etching chamber design for flip chip...

Reactive ion etching of alumina/TiC substrates

Real time monitoring of plasma etching process

Recovery of Mo/Si multilayer coated optical substrates

Remote plasma cleaning method for processing chambers

Remote plasma cleaning source having reduced reactivity with...

Removal of post-RIE polymer on Al/Cu metal line

Removal of process residues on the backside of a substrate

Residue removal by CO2 water rinse in conjunction with post...

RF antenna having high temperature, oxidation resistant coating

RF plasma method

RF plasma reactor with hybrid conductor and multi-radius...

Ridge and mesa optical waveguides