4. Etching a substrate: processes
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Gallium-nitride deposition substrate, method of...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
Reexamination Certificate

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Gallium-nitride deposition substrate, method of...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Gas composition for dry etching and process of dry etching

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Gas distribution system

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Gas for removing deposit and removal method using same

Etching a substrate: processes – Gas phase etching of substrate
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Gas polishing method

Etching a substrate: processes – Gas phase etching of substrate
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Gas purge protection of sensors and windows in a gas phase...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Gas-phase etching and regrowth method for Group III-nitride crys

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Gas-phase silicon etching with bromine trifluoride

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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