Pattern film repair using a focused particle beam system
Patterned coated articles and methods for producing the same
Penning discharge plasma source
Photoresist trimming process
Plasma assisted chemical transport method and apparatus
Plasma cleaning of a CVD or etch reactor using helium for plasma
Plasma descaling of metals
Plasma descaling of titanium and titanium alloys
Plasma enchanced chemical method
Plasma energy control by inducing plasma instability
Plasma enhanced CVD apparatus and process, and dry etching appar
Plasma etch apparatus with heated scavenging surfaces
Plasma etch apparatus with heated scavenging surfaces
Plasma etch apparatus with heated scavenging surfaces
Plasma etch method for forming patterned layer with enhanced...
Plasma etch process
Plasma etch process using polymerizing etch gases across a...
Plasma etch process using polymerizing etch gases with...
Plasma etch reactor and method
Plasma etch with trifluoroacetic acid and derivatives